Early stages of growth of gold layers sputter deposited on glass and silicon substrates.

Nanoscale Research Letters
Petr MalinskýVáclav Svorčík

Abstract

Extremely thin gold layers were sputter deposited on glass and silicon substrates, and their thickness and morphology were studied by Rutherford backscattering (RBS) and atomic force microscopy (AFM) methods. The deposited layers change from discontinuous to continuous ones for longer deposition times. While the deposition rate on the silicon substrate is constant, nearly independent on the layer thickness, the rate on the glass substrate increases with increasing layer thickness. The observed dependence can be explained by a simple kinetic model, taking into account different sticking probabilities of gold atoms on a bare glass substrate and regions with gold coverage. Detailed analysis of the shape of the RBS gold signal shows that in the initial stages of the deposition, the gold layers on the glass substrate consist of gold islands with significantly different thicknesses. These findings were confirmed by AFM measurements, too. Gold coverage of the silicon substrate is rather homogeneous, consisting of tiny gold grains, but a pronounced worm-like structure is formed for the layer thickness at electrical continuity threshold. On the glass substrate, the gold clusters of different sizes are clearly observed. For later deposi...Continue Reading

Citations

May 23, 2013·Nanoscale Research Letters·Anna SchaubVáclav Svorčík
Feb 26, 2016·Optics Express·Ahmmed A RifatF R Mahamd Adikan
Feb 2, 2016·The Review of Scientific Instruments·Jia YangAaron J Schmidt
May 13, 2015·Analytical Chemistry·Viera MalachovskáChristophe Caucheteur
Feb 28, 2015·ACS Applied Materials & Interfaces·Lorenzo LeandroAndrei Lavrinenko
Apr 8, 2020·Nanomaterials·Susanne SandellJianying He
Nov 21, 2014·Nanotechnology·G SeguiniM Perego
Jan 1, 2020·Nanomaterials·Stefan SchrittwieserJoerg Schotter
Jan 24, 2013·Langmuir : the ACS Journal of Surfaces and Colloids·Peter N NirmalrajHeike Riel
Jan 27, 2019·ACS Applied Materials & Interfaces·Bernd PeetersJeroen Lammertyn
Oct 17, 2019·ACS Applied Materials & Interfaces·Pramod Patil KunturuJurriaan Huskens

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Methods Mentioned

BETA
atomic force microscopy
AFM

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