Effect of oxygen and ozone on p-type doping of ultra-thin WSe2 and MoSe2 field effect transistors

Physical Chemistry Chemical Physics : PCCP
Shunfeng WangGoki Eda

Abstract

We report on the p-type doping effect of oxygen and ozone molecules on mono- and few-layer WSe2 and MoSe2 field effect transistors. We show that adsorption of oxygen and ozone under ambient conditions results in subtantial doping and corresponding enhancement in the hole conductivity of the devices. Ozone-induced doping is found to be rapid and efficient, saturating within minutes of exposure whereas oxygen-induced doping occurs over a period of days to reach the equivalent level of doping. Our observations reveal that the water adlayer on the material surface plays a crucial role in solubilizing oxygen and ozone and in forming a redox couple with a large chemical potential.

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Citations

Mar 11, 2016·Nano Letters·Mahito YamamotoKazuhito Tsukagoshi
Sep 25, 2019·Molecules : a Journal of Synthetic Chemistry and Natural Product Chemistry·Magdalena BłaszakIreneusz Ochmian
Aug 19, 2020·ACS Applied Materials & Interfaces·James L DohertyAaron D Franklin
Jul 18, 2018·ACS Applied Materials & Interfaces·Shuangqing FanJing Liu
May 11, 2019·ACS Applied Materials & Interfaces·Kang-Nyeoung LeeMun Seok Jeong

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