Effect of specimen misalignment on local structure analysis using annular dark-field imaging

Journal of Electron Microscopy
Yeong-Gi So, Koji Kimoto

Abstract

We have investigated the effects of a small misalignment of the crystallographic orientation with respect to an incident probe (i.e. crystal tilt) on annular dark-field (ADF) imaging in scanning transmission electron microscopy (STEM). In STEM-ADF imaging with a small convergence angle, crystal tilt causes an artifact such as a shift of the bright spots corresponding to atomic columns. The displacement of the spots in ADF images differs for each atomic column, resulting in the breakdown of the incoherent imaging approximation. For a large convergence angle, in contrast, bright spot positions correctly correspond to the atomic positions. A multislice simulation indicates that the superior intuitive interpretability for a large convergence angle is due to a small depth of focus. The findings suggest that a large convergence angle enables the accurate measurement of atomic positions as well as improved spatial resolution.

References

Feb 19, 1990·Physical Review Letters·S J Pennycook, D E Jesson
Feb 6, 2007·Journal of Electron Microscopy·Koji KimotoYoshio Matsui
Jun 12, 1970·Science·A V CreweJ Langmore
Dec 28, 2007·Ultramicroscopy·S E Maccagnano-ZacherJ Silcox
Nov 27, 2008·Journal of Electron Microscopy·Mitsuhiro SaitoKazuo Ishizuka

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Citations

Oct 20, 2015·Ultramicroscopy·Dan ZhouPeter A van Aken
Jul 15, 2015·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·J Houston DycusJames M LeBeau
Apr 24, 2021·Ultramicroscopy·Katherine E MacArthurRafal E Dunin-Borkowski
Aug 21, 2021·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Jingyue Jimmy Liu

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