Electrical Properties of Low-Temperature Processed Sn-Doped In2 O3 Thin Films: The Role of Microstructure and Oxygen Content and the Potential of Defect Modulation Doping

Materials
Getnet Kacha DeyuAndreas Klein

Abstract

Low-temperature-processed ITO thin films offer the potential of overcoming the doping limit by suppressing the equilibrium of compensating oxygen interstitial defects. To elucidate this potential, electrical properties of Sn-doped In 2 O 3 (ITO) thin films are studied in dependence on film thickness. In-operando conductivity and Hall effect measurements during annealing of room-temperature-deposited films, together with different film thickness in different environments, allow to discriminate between the effects of crystallization, grain growth, donor activation and oxygen diffusion on carrier concentrations and mobilities. At 200 ∘ C , a control of carrier concentration by oxygen incorporation or extraction is only dominant for very thin films. The electrical properties of thicker films deposited at room temperature are mostly affected by the grain size. The remaining diffusivity of compensating oxygen defects at 200 ∘ C is sufficient to screen the high Fermi level induced by deposition of Al 2 O 3 using atomic layer deposition (ALD), which disables the use of defect modulation doping at this temperature. The results indicate that achieving higher carrier concentrations in ITO thin films requires a control of the oxygen pressu...Continue Reading

References

Mar 16, 2007·Physical Review Letters·Stephan Lany, Alex Zunger
Oct 15, 2008·Physical Review Letters·P D C KingC F McConville
Nov 11, 2009·Journal of Physics. Condensed Matter : an Institute of Physics Journal·Péter AgostonKarsten Albe
Jul 20, 2016·Journal of Nanoscience and Nanotechnology·Seon Tae KimJin Kon Kim
Jul 28, 2016·ACS Applied Materials & Interfaces·Sebastian SiolAndreas Klein
Feb 6, 2015·Materials·Hans F WardengaAndreas Klein

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Citations

Aug 3, 2019·Molecules : a Journal of Synthetic Chemistry and Natural Product Chemistry·Getnet Kacha DeyuDaniel Bellet
Jun 3, 2021·Materials·Philipp WendelAndreas Klein

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