Electron-Beam-Induced Deposition as a Technique for Analysis of Precursor Molecule Diffusion Barriers and Prefactors

ACS Applied Materials & Interfaces
Jared CullenMilos Toth

Abstract

Electron-beam-induced deposition (EBID) is a direct-write chemical vapor deposition technique in which an electron beam is used for precursor dissociation. Here we show that Arrhenius analysis of the deposition rates of nanostructures grown by EBID can be used to deduce the diffusion energies and corresponding preexponential factors of EBID precursor molecules. We explain the limitations of this approach, define growth conditions needed to minimize errors, and explain why the errors increase systematically as EBID parameters diverge from ideal growth conditions. Under suitable deposition conditions, EBID can be used as a localized technique for analysis of adsorption barriers and prefactors.

References

Sep 29, 2012·Beilstein Journal of Nanotechnology·Michael HuthGeorg Fantner
Oct 23, 2012·Physical Review Letters·James BishopMilos Toth
Dec 25, 2012·Nanotechnology·M BresinK A Dunn
Mar 21, 2013·Scientific Reports·Amalio Fernández-PachecoRussell P Cowburn
Jan 23, 2014·ACS Nano·Aleksandar P IvanovJoshua B Edel
Feb 8, 2014·ACS Applied Materials & Interfaces·Robert WinklerHarald Plank
Oct 22, 2014·ACS Applied Materials & Interfaces·Aiden A Martin, Milos Toth
Oct 2, 2015·Beilstein Journal of Nanotechnology·Milos TothIvo Utke

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