Electron ptychography of 2D materials to deep sub-ångström resolution

Nature
Yi JiangDavid A Muller

Abstract

Aberration-corrected optics have made electron microscopy at atomic resolution a widespread and often essential tool for characterizing nanoscale structures. Image resolution has traditionally been improved by increasing the numerical aperture of the lens (α) and the beam energy, with the state-of-the-art at 300 kiloelectronvolts just entering the deep sub-ångström (that is, less than 0.5 ångström) regime. Two-dimensional (2D) materials are imaged at lower beam energies to avoid displacement damage from large momenta transfers, limiting spatial resolution to about 1 ångström. Here, by combining an electron microscope pixel-array detector with the dynamic range necessary to record the complete distribution of transmitted electrons and full-field ptychography to recover phase information from the full phase space, we increase the spatial resolution well beyond the traditional numerical-aperture-limited resolution. At a beam energy of 80 kiloelectronvolts, our ptychographic reconstruction improves the image contrast of single-atom defects in MoS2 substantially, reaching an information limit close to 5α, which corresponds to an Abbe diffraction-limited resolution of 0.39 ångström, at the electron dose and imaging conditions for whi...Continue Reading

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Jun 10, 2021·Jan CaronKarina Ruzaeva
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Feb 14, 2020·Jay Schyndel vanJan Caron
Feb 18, 2020·Jay Schyndel vanKarina Ruzaeva
Feb 12, 2020·Knut Müller-CasparyRafal E. Dunin-Borkowski
Feb 12, 2020·Karina RuzaevaAlexander Clausen
Dec 12, 2019·Jay Schyndel vanVadim Migunov
Oct 7, 2019·Jan CaronDieter Weber
Oct 14, 2019·Magnus NordDieter Weber
Oct 7, 2019·Karina RuzaevaDieter Weber
Aug 13, 2020·Colin OphusBarnaby D.A. Levin
Nov 5, 2018·Matthew BryanRahul Chandra
Apr 23, 2020·Alexander ClausenVadim Migunov

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Methods Mentioned

BETA
transmission electron microscopy
electron-scattering
imaging techniques
electron ptychography

Software Mentioned

μSTEM
ePIE

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