Evaluation of electron tomography reconstruction methods for interface roughness measurement

Microscopy Research and Technique
Misa HayashidaMarek Malac

Abstract

We evaluate the suitability of simultaneous iterative reconstruction technique (SIRT), filtered back projection, and simultaneous algebraic reconstruction technique methods for buried interface roughness measurements. We also investigate the effect of total electron dose distributed over the entire tilt series on measured roughness values. We investigate the applicability of the dose fractionation theorem by evaluating the effect of an increasing number of images, i.e., decreasing tilt increment size at fixed total electron irradiation dose on the quantitative measurement of buried interface roughness. The results indicate that SIRT is the most suitable method for reconstruction and a 3° to 5° angle is optimal for the roughness measurement.

References

Nov 24, 2004·Ultramicroscopy·Bernhard SchafferGerald Kothleitner
Jan 1, 1986·IEEE Transactions on Medical Imaging·J Radon
Mar 10, 2009·Ultramicroscopy·K J BatenburgG Van Tendeloo
Oct 25, 2016·Micron : the International Research and Review Journal for Microscopy·Misa Hayashida, Marek Malac

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Citations

Nov 21, 2020·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Misa HayashidaKiichi Fukui

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