PMID: 15244288Jul 13, 2004Paper

Evaluation of mass-produced commercial LiTaO3 single crystals using the LFB ultrasonic material characterization system

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
J I KushibikiMasami Mochizuki

Abstract

A mass-production line of lithium tantalate (LiTaO3) crystals with a maximum charge number of 60 for surface acoustic wave (SAW) devices was evaluated with the line-focus-beam (LFB) ultrasonic material characterization system. Some serious problems associated with chemical compositions were observed and resolved by measuring the velocities of Rayleigh-type leaky surface acoustic waves (LSAWs), VLSAW, for two groups of LiTaO3 wafers: 21 36 degrees Y X-LiTaO3 wafers selected randomly from crystal ingots grown with different charge numbers in different furnaces, and 14 42 degrees Y X-LiTaO3 wafers obtained at the top, middle, and bottom parts from 5 crystals selected from 39 crystals grown successively in the same furnace and crucible. Using the measured VLSAW and the predetermined relationship between VLSAW and Li2O concentrations, M(Li2O), we estimated the average M(Li2O) controlled in the current mass-production line to be about 48.77 mol% with a maximum difference of 0.75 mol%. The composition for each crystal ingot increased linearly about 0.04 mol% from the top to the bottom, and no dependence on the charge number was observed, as the melt composition used for the mass production was controlled through Curie temperature (TC)...Continue Reading

References

Sep 26, 2001·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·O KawachiM Yamaguchi
Feb 9, 2002·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Juin-ichi KushibikiShouichi Nishiyama
Feb 9, 2002·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Jun-ichi KushibikiMototaka Arakawa
May 7, 2002·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Jun-ichi KushibikiTakaaki Ujiie
Jun 22, 2002·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Jun-ichi KushibikiRyoichi Okabe
Aug 3, 2002·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Jun-ichi KushibikiTakeji Sasamata
Feb 2, 2008·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·J I KushibikiM Arakawa
Feb 2, 2008·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·J KushibikiY Ono
Feb 5, 2008·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·J I Kushibiki, M Arakawa
Feb 5, 2008·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·J KushibikiT Sannomiya
Jan 1, 1993·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·C W RuppelK C Wagner

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