Evaluation of residual aberration in fifth-order geometrical aberration correctors

Microscopy
Shigeyuki MorishitaHidetaka Sawada

Abstract

Higher order geometrical aberration correctors for transmission electron microscopes are essential for atomic-resolution imaging, especially at low-accelerating voltages. We quantitatively calculated the residual aberrations of fifth-order aberration correctors to determine the dominant aberrations. The calculations showed that the sixth-order three-lobe aberration was dominant when fifth-order aberrations were corrected by using the double-hexapole or delta types of aberration correctors. It was also deduced that the sixth-order three-lobe aberration was generally smaller in the delta corrector than in the double-hexapole corrector. The sixth-order three-lobe aberration was counterbalanced with a finite amount of the fourth-order three-lobe aberration and 3-fold astigmatism. In the experiments, we used a low-voltage microscope equipped with delta correctors for probe- and image-forming systems. Residual aberrations in each system were evaluated using Ronchigrams and diffractogram tableaux, respectively. The counterbalanced aberration correction was applied to obtain high-resolution transmission electron microscopy images of graphene and WS2 samples at 60 and 15 kV, respectively.

References

Jun 24, 2005·Journal of Electron Microscopy·Hidetaka SawadaDavid Cockayne
Apr 28, 2009·Physical Review Letters·Rolf ErniUlrich Dahmen
Apr 29, 2009·Journal of Electron Microscopy·Bernd KabiusHarald Rose
Dec 1, 2006·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Heiko MüllerMaximilian Haider
Feb 8, 2013·Microscopy·Fumio HosokawaKazutomo Suenaga
Mar 25, 2014·Ultramicroscopy·Masaki MukaiAngus I Kirkland
May 21, 2014·Ultramicroscopy·Takeo SasakiKazu Suenaga
Apr 1, 2015·Microscopy·Hidetaka SawadaYuichi Ikuhara
Aug 27, 2016·Physical Review Letters·Martin LinckUte Kaiser

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Citations

May 28, 2019·Nature Communications·N ShibataY Ikuhara
Jul 20, 2018·Nature·John Rodenburg

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