Experimental and modeling studies of B atom number density distributions in hot filament activated B2H6/H2 and B2H6/CH4/H2 gas mixtures

The Journal of Physical Chemistry. a
Dane W ComerfordYuri A Mankelevich

Abstract

Experimental and modeling studies of the gas-phase chemistry occurring in dilute, hot filament (HF) activated B2H6/H2 and B2H6/CH4/H2 gas mixtures are reported. Spatially resolved relative number densities of B (and H) atoms have been measured by resonance enhanced multiphoton ionization methods, as a function of process conditions (e.g. the HF material and its temperature, the B2H6/H2 mixing ratio, and the presence (or not) of added CH4). Three-dimensional modeling of the H/B chemistry prevailing in such HF activated gas mixtures using a simplified representation of the gas phase chemistry succeeds in reproducing all of the experimentally observed trends, and in illustrating the key role of the "H-shifting" reactions BHx + H <= => BHx-1 + H2 (x = 1-3) in enabling rapid interconversion between the various BHx (x = 0-3) species. CH4 addition, at partial pressures appropriate for growth of boron-doped diamond by chemical vapor deposition methods, leads to approximately 30% reduction in the measured B atom signal near the HF. The modeling suggests that this is mainly due to concomitant H atom depletion near the HF, but it also allows us a first assessment of the possible contributions from B/C coupling reactions upon CH4 addition ...Continue Reading

References

Jun 9, 2001·Science·S KoizumiH Kanda
Sep 7, 2002·Science·Jan IsbergGeoffrey A Scarsbrook
Mar 21, 2005·Physical Chemistry Chemical Physics : PCCP·Andrew CheesmanMichael N R Ashfold

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Citations

Aug 7, 2009·The Journal of Chemical Physics·Dane W ComerfordYuri A Mankelevich
Feb 5, 2019·Physical Chemistry Chemical Physics : PCCP·Ebenezer Owusu-AnsahYujun Shi
Jun 25, 2014·The Journal of Physical Chemistry. a·Hironobu UmemotoAkihito Tanaka

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