PMID: 9524142Dec 16, 1998Paper

Exploring Spatial Resolution in Electron Back-Scattered Diffraction Experiments via Monte Carlo Simulation

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
S X RenA Goyal

Abstract

A Monte Carlo model was used to simulate specimen-electron beam interactions relevant to electron back-scattered diffraction (EBSD). Electron trajectories were calculated for a variety of likely experimental conditions to examine the interaction volume of the incident electrons as well as that of the subset of incident electrons that emerge from the specimen, i.e., back-scattered electrons (BSEs). The spatial resolution of EBSD was investigated as functions of both materials properties, such as atomic number, atomic weight, and density, and experimental parameters, such as specimen thickness, tilt, and incident beam accelerating voltage. These simulations reveal that the achievable spatial resolution in EBSD is determined by these intrinsic and extrinsic parameters.

Citations

Nov 10, 2011·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Vineet Kumar
Aug 16, 2013·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Delphic Chen, Jui-Chao Kuo
Dec 29, 2017·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Etienne Brodu, Emmanuel Bouzy
Jun 26, 2020·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Joshua D SugarJoseph R Michael
Nov 18, 2017·Ultramicroscopy·Travis M RamptonDavid T Fullwood
Feb 8, 2011·Acta Biomaterialia·Andreas J GoetzWolfgang W Schmahl

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