Fabrication and selective surface modification of 3-dimensionally textured biomedical polymers from etched silicon substrates

Journal of Biomedical Materials Research
R KapurA S Rudolph

Abstract

A new method is described for producing biomedically relevant polymers with precisely defined micron scale surface texture in the x, y, and z planes. Patterned Si templates were fabricated using photolithography to create a relief pattern in photoresist with lateral dimensions as small as 1 micron. Electroless Ni was selectively deposited in the trenches of the patterned substrate. The Ni served as a resilient mask for transferring the patterns onto the Si substrate to depths of up to 8.5 microns by anisotropic reactive ion etching with a fluorine-based plasma. The 3-dimensional (3-D) textured silicon substrates were used as robust, reusable molds for pattern transfer onto poly (dimethyl siloxane), low density poly (ethylene), poly (L-lactide), and poly (glycolide) by either casting or injection molding. The fidelity of the pattern transfer from the silicon substrates to the polymers was 90 to 95% in all three planes for all polymers for more than 60 transfers from a single wafer, as determined by scanning electron microscopy and atomic force microscopy. Further, the 3-D textured polymers were selectively modified to coat proteins either in the trenches or on the mesas by capillary modification or selective coating techniques. ...Continue Reading

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Citations

Jun 10, 1998·Journal of Biomedical Materials Research·M Epple, O Herzberg
May 17, 2000·Journal of Biomedical Materials Research·J DeutschT A Desai
Sep 11, 2002·Journal of Biomedical Materials Research·Alvaro MataShuvo Roy
Mar 22, 2001·Medical Engineering & Physics·T A Desai
Mar 18, 1999·Journal of Biomechanical Engineering·A FolchM Toner
Mar 18, 1999·Journal of Biomechanical Engineering·R KapurA S Rudolph
Nov 10, 2001·Annual Review of Biomedical Engineering·A Folch, M Toner
Nov 7, 2001·Chemistry : a European Journal·S L BrandowW J Dressick
Jan 10, 2012·Langmuir : the ACS Journal of Surfaces and Colloids·Xueyuan Wang, R A Weiss

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