Fabrication of nanostripe surface structure by multilayer film deposition combined with micropatterning

Nanotechnology
Y AndoH Mano

Abstract

Top-down fabrication processes for nanostructures are superior to bottom-up processes from the aspect of long-range order, but have limitations in their processing time and/or material selection. Here we developed a nanopatterning method for 'nanostripes' that incorporates deposition of a multilayer film on a microscale slope array and mechanical polishing. This method is used to fabricate a nanostripe structure consisting of two kinds of materials to form a stripe array on a silicon substrate. Although this nanopatterning method is categorized as a top-down fabrication process, the fabrication efficiency is quite high, because the number of nanostripes is 'multiplied' by the number of multilayered films. Another feature of the nanostripe is renewability; even if the nanostripe surface is damaged, the underlying nanostructure can be exposed and form a similar nanostripe by polishing. The nanostripe structure can be easily applied to a wide range of fields due to its ease of production.

References

Oct 7, 2004·Nature Materials·Joy Y ChengCaroline A Ross
Apr 3, 2008·Langmuir : the ACS Journal of Surfaces and Colloids·Koji MiyakeShinya Sasaki

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Citations

Dec 14, 2011·Advances in Colloid and Interface Science·Abhijit BiswasFranz Faupel

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