Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices

Applied Optics
Malalahalli S GiridharMasud Mansuripur

Abstract

We describe a technique for surface and subsurface micromachining of glass substrates by using tightly focused femtosecond laser pulses at a wavelength of 1660 nm. A salient feature of pulsed laser micromachining is its ability to drill subsurface tunnels into glass substrates. To demonstrate a potential application of this micromachining technique, we fabricate simple microfluidic structures on a glass plate. The use of a cover plate that seals the device by making point-to-point contact with the flat surface of the substrate is necessary to prevent the evaporation of liquids in open channels and chambers. Methods for protecting and sealing the micromachined structures for microfluidic applications are discussed.

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Citations

Nov 1, 2011·Journal of Laser Applications·L CostaC Janetopoulos
Jun 15, 2006·Analytical and Bioanalytical Chemistry·Chantal G Khan Malek
Nov 27, 2014·Journal of Laboratory Automation·Candice M HovellYongTae Kim
Jan 30, 2014·Nature Communications·M MirkhalafF Barthelat
May 7, 2009·Nanotechnology·Daniel Day, Min Gu
Oct 17, 2014·Applied Optics·Daniel NietoMaría Teresa Flores-Arias
Apr 4, 2015·Optics Express·Annalisa VolpeRoberto Osellame
May 1, 2021·Micromachines·Agnė Butkutė, Linas Jonušauskas

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