Ferroelectricity in Hf0.5 Zr0.5 O2 Thin Films: A Microscopic Study of the Polarization Switching Phenomenon and Field-Induced Phase Transformations

ACS Applied Materials & Interfaces
Anastasia ChouprikDmitrii Negrov

Abstract

Because of their full compatibility with the modern Si-based technology, the HfO2-based ferroelectric films have recently emerged as viable candidates for application in nonvolatile memory devices. However, despite significant efforts, the mechanism of the polarization switching in this material is still under debate. In this work, we elucidate the microscopic nature of the polarization switching process in functional Hf0.5Zr0.5O2-based ferroelectric capacitors during its operation. In particular, the static domain structure and its switching dynamics following the application of the external electric field have been monitored with the advanced piezoresponse force microscopy (PFM) technique providing a nm resolution. Separate domains with strong built-in electric field have been found. Piezoresponse mapping of pristine Hf0.5Zr0.5O2 films revealed the mixture of polar phase grains and regions with low piezoresponse as well as the continuum of polarization orientations in the grains of polar orthorhombic phase. PFM data combined with the structural analysis of pristine versus trained film by plan-view transmission electron microscopy both speak in support of a monoclinic-to-orthorhombic phase transition in ferroelectric Hf0.5Zr0....Continue Reading

References

Oct 30, 2014·Advanced Materials·Dominik MartinThomas Mikolajick
Nov 5, 2014·ACS Applied Materials & Interfaces·Tony SchenkThomas Mikolajick
Feb 14, 2015·Advanced Materials·Min Hyuk ParkCheol Seong Hwang
Aug 27, 2015·ACS Applied Materials & Interfaces·Tony SchenkUwe Schroeder
Feb 1, 2017·Scientific Reports·Sungho KimYunseok Kim

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Citations

Aug 17, 2020·Nanomaterials·Umberto CelanoPaul van der Heide
Mar 23, 2021·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Maxim SpiridonovDmitrii Negrov
Jul 1, 2021·Nanoscale·Anastasia ChouprikAndrei Zenkevich
Aug 15, 2018·ACS Applied Materials & Interfaces·Igor StolichnovAdrian M Ionescu
Dec 2, 2020·ACS Applied Materials & Interfaces·Anastasia ChouprikDmitrii Negrov
Dec 29, 2018·ACS Applied Materials & Interfaces·Tae Yoon LeeSeung Chul Chae
Aug 14, 2019·ACS Applied Materials & Interfaces·Vitalii MikheevDmitrii Negrov
Sep 25, 2018·ACS Applied Materials & Interfaces·Seung Dam HyunCheol Seong Hwang
Sep 2, 2020·ACS Applied Materials & Interfaces·Liam Collins, Umberto Celano
Sep 22, 2020·ACS Applied Electronic Materials·Pavan NukalaBeatriz Noheda

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