Few-Layer MoS2 p-Type Devices Enabled by Selective Doping Using Low Energy Phosphorus Implantation

ACS Nano
Ankur NipaneSaurabh Lodha

Abstract

P-type doping of MoS2 has proved to be a significant bottleneck in the realization of fundamental devices such as p-n junction diodes and p-type transistors due to its intrinsic n-type behavior. We report a CMOS compatible, controllable and area selective phosphorus plasma immersion ion implantation (PIII) process for p-type doping of MoS2. Physical characterization using SIMS, AFM, XRD and Raman techniques was used to identify process conditions with reduced lattice defects as well as low surface damage and etching, 4X lower than previous plasma based doping reports for MoS2. A wide range of nondegenerate to degenerate p-type doping is demonstrated in MoS2 field effect transistors exhibiting dominant hole transport. Nearly ideal and air stable, lateral homogeneous p-n junction diodes with a gate-tunable rectification ratio as high as 2 × 10(4) are demonstrated using area selective doping. Comparison of XPS data from unimplanted and implanted MoS2 layers shows a shift of 0.67 eV toward lower binding energies for Mo and S peaks indicating p-type doping. First-principles calculations using density functional theory techniques confirm p-type doping due to charge transfer originating from substitutional as well as physisorbed phosp...Continue Reading

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Citations

Aug 6, 2016·Nanoscale·Torben DaenekeKourosh Kalantar-Zadeh
Aug 6, 2016·Nano Letters·Angelica AzcatlRobert M Wallace
Jun 13, 2017·ACS Applied Materials & Interfaces·Filippo GiannazzoFabrizio Roccaforte
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Dec 16, 2017·Journal of Physics. Condensed Matter : an Institute of Physics Journal·Oscar Rodrigo Avalos-OvandoSergio E Ulloa
Apr 3, 2019·Nanoscale·Xuyi LuoYa-Qiong Xu
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Mar 20, 2020·Scientific Reports·Jeongwoon HwangKyeongjae Cho
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Feb 16, 2021·ACS Nano·Youwei ZhangShun Wang
Mar 2, 2021·Advanced Materials·Fakun WangTianyou Zhai

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