Figure correction of borosilicate glass substrates by nanosecond UV excimer laser irradiation

Optics Express
Clemens M Beckmann, Jürgen Ihlemann

Abstract

The mechanical stress in thin films can have a deleterious effect on the quality of optical components by deforming the underlying substrate. In addition, the substrate might be deformed by gravity or stress induced by mounting. We suggest a method to compensate the substrate deformation by laser generated tensile stresses in the backside of the substrate. We show results for irradiation of the borosilicate glass Schott D263M with an ArF excimer laser. We measured the integrated stress in dependence of the laser fluence and corrected a sample for the deformation by a chromium coating. We show that also antibiaxial plane stress components can be induced. For precise corrections a scheme for stabilization of the generated surface stresses still needs to be developed.

References

Nov 13, 2015·Optics Express·Youwei YaoMelville Ulmer
Nov 22, 2018·Journal of the Optical Society of America. A, Optics, Image Science, and Vision·Brandon D ChalifouxMark L Schattenburg
May 6, 2019·Optics Express·Brandon D ChalifouxMark L Schattenburg
Apr 1, 2020·Applied Optics·J B OliverB Charles

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