Fill-factor improvement of Si CMOS single-photon avalanche diode detector arrays by integration of diffractive microlens arrays

Optics Express
Giuseppe IntermiteGerald S Buller

Abstract

Single-photon avalanche diode (SPAD) detector arrays generally suffer from having a low fill-factor, in which the photo-sensitive area of each pixel is small compared to the overall area of the pixel. This paper describes the integration of different configurations of high efficiency diffractive optical microlens arrays onto a 32 × 32 SPAD array, fabricated using a 0.35 µm CMOS technology process. The characterization of SPAD arrays with integrated microlens arrays is reported over the spectral range of 500-900 nm, and a range of f-numbers from f/2 to f/22. We report an average concentration factor of 15 measured for the entire SPAD array with integrated microlens array. The integrated SPAD and microlens array demonstrated a very high uniformity in overall efficiency.

References

Feb 26, 2015·Nature Communications·Genevieve GariepyDaniele Faccio
Sep 26, 2015·Optics Express·Rudi LussanaFranco Zappa

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Citations

Oct 28, 2019·Light, Science & Applications·Claudio BruschiniEdoardo Charbon
Feb 7, 2020·Methods and Applications in Fluorescence·Chetan PoudelClemens F Kaminski
Nov 25, 2018·Optics Express·Ximing RenGerald S Buller
May 14, 2020·Applied Optics·Frédéric ZanellaMustapha Zahir
Mar 14, 2018·Optics Express·Ximing RenGerald S Buller
May 15, 2020·Optics Express·Kazuhiro Morimoto, Edoardo Charbon
Apr 9, 2021·Journal of Biophotonics·Peter W R ConnollyGerald S Buller
Jul 3, 2021·Sensors·Francesca Madonini, Federica Villa

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