Foldable and Cytocompatible Sol-gel TiO2 Photonics

Scientific Reports
Lan LiJuejun Hu

Abstract

Integrated photonics provides a miniaturized and potentially implantable platform to manipulate and enhance the interactions between light and biological molecules or tissues in in-vitro and in-vivo settings, and is thus being increasingly adopted in a wide cross-section of biomedical applications ranging from disease diagnosis to optogenetic neuromodulation. However, the mechanical rigidity of substrates traditionally used for photonic integration is fundamentally incompatible with soft biological tissues. Cytotoxicity of materials and chemicals used in photonic device processing imposes another constraint towards these biophotonic applications. Here we present thin film TiO2 as a viable material for biocompatible and flexible integrated photonics. Amorphous TiO2 films were deposited using a low temperature (<250 °C) sol-gel process fully compatible with monolithic integration on plastic substrates. High-index-contrast flexible optical waveguides and resonators were fabricated using the sol-gel TiO2 material, and resonator quality factors up to 20,000 were measured. Following a multi-neutral-axis mechanical design, these devices exhibit remarkable mechanical flexibility, and can sustain repeated folding without compromising th...Continue Reading

References

Aug 16, 2001·Journal of Biomedical Materials Research·K YoshidaM Atsuta
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Apr 11, 2009·Biotechnology and Bioengineering·Amy K ManocchiHyunmin Yi
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Jan 23, 2014·Proceedings of the National Academy of Sciences of the United States of America·Canan DagdevirenJohn A Rogers

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Citations

Mar 7, 2019·Light, Science & Applications·Lan LiJuejun Hu
Aug 15, 2019·Scientific Reports·Manoel L da Silva-NetoAnderson S L Gomes
Jun 3, 2021·Materials·Daniel Alves BarcelosM Clara Gonçalves
Mar 22, 2019·ACS Applied Materials & Interfaces·Tae-Ik LeeTaek-Soo Kim

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Methods Mentioned

BETA
infrared spectroscopy
biosensor
X-ray
atomic force microscopy
AFM
delamination
chip
chips

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