Fully three-dimensional modeling of the fabrication and behavior of photonic crystals formed by holographic lithography

Journal of the Optical Society of America. A, Optics, Image Science, and Vision
Raymond C Rumpf, Eric Johnson

Abstract

A comprehensive and fully three-dimensional model of holographic lithography is used to predict more rigorously the geometry and transmission spectra of photonic crystals formed in Epon SU-8 photoresist. It is the first effort known to the authors to incorporate physics of exposure, postexposure baking, and developing into three-dimensional models of photonic crystals. Optical absorption, reflections, standing waves, refraction, beam coherence, acid diffusion, resist shrinkage, and developing effects combine to distort lattices from their ideal geometry. These are completely neglected by intensity-threshold methods used throughout the literature to predict lattices. Numerical simulations compare remarkably well with experimental results for a face-centered-cube (FCC) photonic crystal. Absorption is shown to produce chirped lattices with broadened bandgaps. Reflections are shown to significantly alter lattice geometry and reduce image contrast. Through simulation, a diamond lattice is formed by multiple exposures, and a hybrid trigonal-FCC lattice is formed that exhibits properties of both component lattices.

References

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Nov 5, 2002·Journal of the Optical Society of America. A, Optics, Image Science, and Vision·L Z CaiY R Wang
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May 16, 2003·Journal of the Optical Society of America. A, Optics, Image Science, and Vision·Chaitanya K UllalShu Yang

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Citations

Jul 5, 2012·The Review of Scientific Instruments·G M BurrowT K Gaylord
Sep 5, 2005·Optics Express·Raymond Rumpf, Eric Johnson
Oct 4, 2007·Journal of the Optical Society of America. A, Optics, Image Science, and Vision·Raymond C RumpfStephen M Kuebler
Apr 16, 2007·Optics Express·Raymond C RumpfMarkus E Testorf
Sep 17, 2007·Optics Express·Raphi DrorA Cashingad
Aug 15, 2014·Journal of the Optical Society of America. A, Optics, Image Science, and Vision·Matthieu C R Leibovici, Thomas K Gaylord
Aug 14, 2020·The Journal of Physical Chemistry. B·Adela HabibRavishankar Sundararaman

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