High efficiency integration of three-dimensional functional microdevices inside a microfluidic chip by using femtosecond laser multifoci parallel microfabrication

Scientific Reports
Bing XuKoji Sugioka

Abstract

High efficiency fabrication and integration of three-dimension (3D) functional devices in Lab-on-a-chip systems are crucial for microfluidic applications. Here, a spatial light modulator (SLM)-based multifoci parallel femtosecond laser scanning technology was proposed to integrate microstructures inside a given 'Y' shape microchannel. The key novelty of our approach lies on rapidly integrating 3D microdevices inside a microchip for the first time, which significantly reduces the fabrication time. The high quality integration of various 2D-3D microstructures was ensured by quantitatively optimizing the experimental conditions including prebaking time, laser power and developing time. To verify the designable and versatile capability of this method for integrating functional 3D microdevices in microchannel, a series of microfilters with adjustable pore sizes from 12.2 μm to 6.7 μm were fabricated to demonstrate selective filtering of the polystyrene (PS) particles and cancer cells with different sizes. The filter can be cleaned by reversing the flow and reused for many times. This technology will advance the fabrication technique of 3D integrated microfluidic and optofluidic chips.

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Citations

Apr 14, 2017·Angewandte Chemie·Markus M ZiegerChristopher Barner-Kowollik
Mar 10, 2018·Small·Nan JiangAli K Yetisen
Jul 19, 2018·Nature Communications·David GräfeChristopher Barner-Kowollik
Dec 10, 2019·Light, Science & Applications·Patrick S Salter, Martin J Booth
Aug 29, 2021·Light, Science & Applications·Mengqiang ZouYiping Wang

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Methods Mentioned

BETA
chips
chip
optical microscopy
fluorescence microscopy

Software Mentioned

multifoci

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