High electromechanical strain and enhanced temperature characteristics in lead-free (Na,Bi)TiO3 -BaTiO3 thin films on Si substrates

Scientific Reports
Yoshiaki TanakaEiji Fujii

Abstract

Here, we demonstrate the high electromechanical strain and enhanced temperature characteristics in the c-axis-oriented lead-free (Na,Bi)TiO3-BaTiO3 (NBT-BT) polycrystalline thin film prepared on Si substrates by rf magnetron sputtering. The effective transverse piezoelectric coefficient, e31*, estimated from the electromechanical strain measured under high electric field, reaches a high level of -12.5 C/m2, and is comparable to those of conventional Pb(Zr,Ti)O3 films. In-situ X-ray diffraction measurement and electron diffraction analysis revealed the electromechanical strain of the NBT-BT film to originate predominantly in elongation of the tetragonal (P4bm) crystal lattice in the c-axis direction. In addition to the large e31*, the NBT-BT film exhibits enhanced permittivity maximum temperature, Tm, of ~400 °C and no depolarization below Tm, as compared to bulk NBT-BT having Tm ≈ 300 °C and a depolarization temperature of ~100 °C. We conclude that the enhancement of temperature characteristics is associated with the distorted P4bm crystal lattice formed by deposition-induced stress and defects. We believe that the present study paves the way for practical applications of lead-free piezoelectric thin films in electromechanical ...Continue Reading

References

Mar 23, 2002·Acta Crystallographica. Section B, Structural Science·G O Jones, P A Thomas
Jul 26, 2005·Acta Crystallographica. Section B, Structural Science·David I Woodward, Ian M Reaney
May 26, 2007·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Shujun ZhangTadashi Takenaka
Feb 16, 2008·IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control·Eiji FujiiHideo Torii
Nov 19, 2011·Science·S H BaekC B Eom

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Citations

Nov 12, 2020·Scientific Reports·Julio Cesar Camilo Albornoz DiazPaulo Sergio da Silva
Jan 4, 2020·Chemical Reviews·Yu FengWeidong Fei

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Methods Mentioned

BETA
X-ray
electron microscopy
electron diffraction
XRD

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