High precision scanning ellipsometer

Applied Optics
D E Aspnes, A A Studna

Abstract

We describe the design, construction, alignment, and calibration of a photometric ellipsometer of the rotating-analyzer type. Data are obtained by digital sampling of the transmitted flux with an analog-to-digital converter, followed by Fourier transforming of the accumulated data with a dedicated minicomputer. With an operating mechanical rotation frequency of 74 Hz, a data acquisition cycle requires less than 7 msec. The intrinsic precision attainable is high because precision is limited only by shot noise or intrinsic source instabilities, even when relatively weak continuum lamps are used as light sources. Precision may be improved by accumulating the data for consecutive cycles at a fixed wavelength. The system allows complex reflectance ratios to be determined as continuous functions of wavelength from the near infrared to the near ultraviolet spectral range. Data reduction programs can be modified to calculate complex refractive index or dielectric function spectra, or film thicknesses and refractive indices, as well as the usual ellipsometric parameters tanpsi, cosDelta.

References


❮ Previous
Next ❯

Citations

Dec 3, 2016·PloS One·Victoria NguyenBabak Sanii
Aug 15, 1983·Applied Optics·A MoritaniJ Nakai
Mar 1, 1996·Physical Review. B, Condensed Matter·S UbaR Gontarz
Jan 15, 1985·Physical Review. B, Condensed Matter·L ViaM Cardona
Apr 15, 1985·Physical Review. B, Condensed Matter·W B JacksonS Oh
Dec 15, 1992·Physical Review. B, Condensed Matter·W H WeberD E Aspnes
Oct 1, 1989·Physical Review. B, Condensed Matter·M K KellyD E Aspnes
Oct 1, 1991·Physical Review. B, Condensed Matter·Y Y WangZ Shao
Aug 15, 1986·Physical Review. B, Condensed Matter·S LogothetidisM Garriga
Sep 15, 1987·Physical Review. B, Condensed Matter·P LautenschlagerM Cardona
Sep 15, 1987·Physical Review. B, Condensed Matter·P LautenschlagerM Cardona
Nov 1, 1994·Physical Review. B, Condensed Matter·T KatoT Mitsui
Jan 15, 1985·Physical Review. B, Condensed Matter·S LogothetidisM Cardona
Jan 15, 1994·Physical Review. B, Condensed Matter·Y D KimB T Jonker
Sep 20, 2006·Journal of Physics. Condensed Matter : an Institute of Physics Journal·Y OhmasaM Yao
Mar 1, 1990·Applied Optics·G E Jellison, F A Modine
Apr 15, 1986·Physical Review. B, Condensed Matter·G A NiklassonH G Craighead
Sep 15, 1985·Physical Review. B, Condensed Matter·P LautenschlagerM Cardona
Oct 15, 1994·Physical Review. B, Condensed Matter·Y D KimB T Jonker
Aug 15, 1992·Physical Review. B, Condensed Matter·M K KellyK Fostiropoulos
May 15, 2002·Applied Optics·Xiao-Song ZhuLiang-Yao Chen
Nov 15, 1985·Applied Optics·J R BlancoK Vedam
Mar 15, 1979·Applied Optics·H T Minden
Dec 15, 1987·Applied Optics·L Y Chen, D W Lynch
Feb 25, 2014·Journal of the Optical Society of America. A, Optics, Image Science, and Vision·Pieter A A De Beule
Apr 3, 2020·Optics Letters·Yanming ZhuFeng Huang
Jul 1, 1988·Physical Review. B, Condensed Matter·M K KellyP A Morris
Mar 1, 1988·Physical Review. B, Condensed Matter·S EtemadG W Hull
Dec 1, 1993·Physical Review. B, Condensed Matter·Y Y WangP D Han
May 5, 2000·Journal of the Optical Society of America. A, Optics, Image Science, and Vision·S Li
Sep 15, 1985·Applied Optics·G E Jellison, D H Lowndes
Apr 15, 1980·Applied Optics·R C ThompsonE S Fry
Nov 1, 1992·Applied Optics·H ArwinR Jansson

❮ Previous
Next ❯

Related Concepts

Trending Feeds

COVID-19

Coronaviruses encompass a large family of viruses that cause the common cold as well as more serious diseases, such as the ongoing outbreak of coronavirus disease 2019 (COVID-19; formally known as 2019-nCoV). Coronaviruses can spread from animals to humans; symptoms include fever, cough, shortness of breath, and breathing difficulties; in more severe cases, infection can lead to death. This feed covers recent research on COVID-19.

Blastomycosis

Blastomycosis fungal infections spread through inhaling Blastomyces dermatitidis spores. Discover the latest research on blastomycosis fungal infections here.

Nuclear Pore Complex in ALS/FTD

Alterations in nucleocytoplasmic transport, controlled by the nuclear pore complex, may be involved in the pathomechanism underlying multiple neurodegenerative diseases including Amyotrophic Lateral Sclerosis and Frontotemporal Dementia. Here is the latest research on the nuclear pore complex in ALS and FTD.

Applications of Molecular Barcoding

The concept of molecular barcoding is that each original DNA or RNA molecule is attached to a unique sequence barcode. Sequence reads having different barcodes represent different original molecules, while sequence reads having the same barcode are results of PCR duplication from one original molecule. Discover the latest research on molecular barcoding here.

Chronic Fatigue Syndrome

Chronic fatigue syndrome is a disease characterized by unexplained disabling fatigue; the pathology of which is incompletely understood. Discover the latest research on chronic fatigue syndrome here.

Evolution of Pluripotency

Pluripotency refers to the ability of a cell to develop into three primary germ cell layers of the embryo. This feed focuses on the mechanisms that underlie the evolution of pluripotency. Here is the latest research.

Position Effect Variegation

Position Effect Variagation occurs when a gene is inactivated due to its positioning near heterochromatic regions within a chromosome. Discover the latest research on Position Effect Variagation here.

STING Receptor Agonists

Stimulator of IFN genes (STING) are a group of transmembrane proteins that are involved in the induction of type I interferon that is important in the innate immune response. The stimulation of STING has been an active area of research in the treatment of cancer and infectious diseases. Here is the latest research on STING receptor agonists.

Microbicide

Microbicides are products that can be applied to vaginal or rectal mucosal surfaces with the goal of preventing, or at least significantly reducing, the transmission of sexually transmitted infections. Here is the latest research on microbicides.