High-stroke silicon-on-insulator MEMS nanopositioner: control design for non-raster scan atomic force microscopy

The Review of Scientific Instruments
Mohammad MaroufiS O Reza Moheimani

Abstract

A 2-degree of freedom microelectromechanical systems nanopositioner designed for on-chip atomic force microscopy (AFM) is presented. The device is fabricated using a silicon-on-insulator-based process and is designed as a parallel kinematic mechanism. It contains a central scan table and two sets of electrostatic comb actuators along each orthogonal axis, which provides displacement ranges greater than ±10 μm. The first in-plane resonance modes are located at 1274 Hz and 1286 Hz for the X and Y axes, respectively. To measure lateral displacements of the stage, electrothermal position sensors are incorporated in the design. To facilitate high-speed scans, the highly resonant dynamics of the system are controlled using damping loops in conjunction with internal model controllers that enable accurate tracking of fast sinusoidal set-points. To cancel the effect of sensor drift on controlled displacements, washout controllers are used in the damping loops. The feedback controlled nanopositioner is successfully used to perform several AFM scans in contact mode via a Lissajous scan method with a large scan area of 20 μm × 20 μm. The maximum scan rate demonstrated is 1 kHz.

References

Mar 3, 1986·Physical Review Letters·G BinnigC Gerber
Jul 28, 2001·Progress in Biophysics and Molecular Biology·J H HafnerC M Lieber
May 30, 2006·Ultramicroscopy·Georg E FantnerPaul K Hansma
Aug 19, 2009·Nanotechnology·I A Mahmood, S O Reza Moheimani
Aug 14, 2010·Nanotechnology·Y K YongI R Petersen
Jul 5, 2012·The Review of Scientific Instruments·A BazaeiS O Reza Moheimani

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Citations

May 3, 2015·The Review of Scientific Instruments·Anthony G FowlerS O Reza Moheimani
Jan 21, 2017·Nanotechnology·A Ulčinas, Š Vaitekonis
Aug 3, 2019·The Review of Scientific Instruments·Afshin AlipourS O Reza Moheimani

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