Highly Sensitive Electromechanical Piezoresistive Pressure Sensors Based on Large-Area Layered PtSe2 Films

Nano Letters
Stefan WagnerMax C Lemme

Abstract

Two-dimensional (2D) layered materials are ideal for micro- and nanoelectromechanical systems (MEMS/NEMS) due to their ultimate thinness. Platinum diselenide (PtSe2), an exciting and unexplored 2D transition metal dichalcogenide material, is particularly interesting because its low temperature growth process is scalable and compatible with silicon technology. Here, we report the potential of thin PtSe2 films as electromechanical piezoresistive sensors. All experiments have been conducted with semimetallic PtSe2 films grown by thermally assisted conversion of platinum at a complementary metal-oxide-semiconductor (CMOS)-compatible temperature of 400 °C. We report high negative gauge factors of up to -85 obtained experimentally from PtSe2 strain gauges in a bending cantilever beam setup. Integrated NEMS piezoresistive pressure sensors with freestanding PMMA/PtSe2 membranes confirm the negative gauge factor and exhibit very high sensitivity, outperforming previously reported values by orders of magnitude. We employ density functional theory calculations to understand the origin of the measured negative gauge factor. Our results suggest PtSe2 as a very promising candidate for future NEMS applications, including integration into CMOS...Continue Reading

References

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Citations

Feb 18, 2020·Angewandte Chemie·Roman KemptThomas Heine
Jul 9, 2020·Nature Communications·Yury Yu IllarionovTibor Grasser
Aug 9, 2020·Research : a Science Partner Journal·Max C LemmePeter G Steeneken
Feb 9, 2019·Optics Express·Bin HuangShuangchun Wen
Nov 13, 2020·Physical Chemistry Chemical Physics : PCCP·Junbo HeLiangyao Chen
Nov 24, 2020·Advanced Materials·Gaozhong WangWerner J Blau
Jan 13, 2021·Nanoscale·Xianghui Zhang, André Beyer
Feb 13, 2021·International Journal of Biological Macromolecules·Xiao HanChuanling Si
Apr 3, 2021·Nature Communications·Wenjie YanHan-Chun Wu
Feb 28, 2020·Nano-micro Letters·Ali ZavabetiJian Zhen Ou
Jun 23, 2021·Nanotechnology·Banglin CaoZegao Wang
Mar 5, 2019·ACS Applied Materials & Interfaces·Eric SinghHari Singh Nalwa
Aug 14, 2020·The Journal of Physical Chemistry Letters·Kai JiangJunhao Chu
Aug 29, 2021·Sensors·Yiyao PengZhiqiang Wang
Jan 8, 2022·Small Methods·Linnan JiaDavid J Moss

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Methods Mentioned

BETA
X-ray
atomic force microscopy
AFM
chip
chips

Software Mentioned

VASP

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