Humidity sensitivity of multi-walled carbon nanotube networks deposited by dielectrophoresis.

Sensors
Litao LiuTianhong Cui

Abstract

This paper presents an investigation on the humidity sensitivity of deposited multi-walled carbon nanotube (MWCNT) networks using ac dielectrophoresis (DEP) between interdigitated electrodes (IDEs). MWCNTs dispersed in ethanol were trapped and enriched between IDEs on a Si/SiO(2) substrate under a positive DEP force. After the DEP process, the ethanol was evaporated and the MWCNT network on a substrate with IDEs was put into a furnace for repeated thermal annealing. It was found that the resistance stability of the network was effectively improved through thermal annealing. The humidity sensitivity was obtained by measuring the resistance of the MWCNT network with different relative humidity at room temperature. The experimental results show the resistance increases linearly with increasing the relative humidity from 25% to 95% RH with a sensitivity of 0.5%/%RH. The MWCNT networks have a reversible humidity sensing capacity with response time and recovery time of about 3 s and 25 s, respectively. The resistance is dependent on temperature with a negative coefficient of about -0.33%/K in a temperature range from 293 K to 393 K.

References

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Citations

Feb 4, 2016·IEEE Transactions on Nanobioscience·Sankhya Bhattacharya, Milan Sasmal
Mar 22, 2016·ACS Applied Materials & Interfaces·Salman Safari, Theo G M van de Ven
Jun 1, 2020·Electrophoresis·Mohammad Towshif RabbaniAlexandra Ros
Jan 4, 2019·Sensors·Juan Casanova-CháferEduard Llobet
Mar 21, 2019·Langmuir : the ACS Journal of Surfaces and Colloids·Penghui ZhuGang Chen

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