Image resolution and sensitivity in an environmental transmission electron microscope

Micron : the International Research and Review Journal for Microscopy
J R Jinschek, Stig Helveg

Abstract

An environmental transmission electron microscope provides unique means for the atomic-scale exploration of nanomaterials during the exposure to a reactive gas environment. Here we examine conditions to obtain such in situ observations in the high-resolution transmission electron microscopy (HRTEM) mode with an image resolution of 0.10nm. This HRTEM image resolution threshold is mapped out under different gas conditions, including gas types and pressures, and under different electron optical settings, including electron beam energies, doses and dose-rates. The 0.10nm resolution is retainable for H(2) at 1-10mbar. Even for N(2), the 0.10nm resolution threshold is reached up to at least 10mbar. The optimal imaging conditions are determined by the electron beam energy and the dose-rate as well as an image signal-to-noise (S/N) ratio that is consistent with Rose's criterion of S/N≥5. A discussion on the electron-gas interactions responsible for gas-induced resolution deterioration is given based on interplay with complementary electron diffraction (ED), scanning transmission electron microscopy (STEM) as well as electron energy loss spectroscopy (EELS) data.

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Citations

Jan 15, 2013·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Benjamin K Miller, Peter A Crozier
Sep 10, 2013·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Huolin L XinHaimei Zheng
Jun 19, 2013·Microscopy·K YoshidaN Tanaka
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Apr 1, 2015·Chemical Reviews·Dang Sheng SuRobert Schlögl
Mar 10, 2016·Chemical Reviews·Franklin Feng Tao, Peter A Crozier
Oct 6, 2015·Chemical Society Reviews·Silvia BordigaFrédéric Thibault-Starzyk
Sep 23, 2014·Micron : the International Research and Review Journal for Microscopy·H A CalderonO Solorza-Feria
Sep 24, 2014·Micron : the International Research and Review Journal for Microscopy·S HelvegH Frei
Aug 26, 2014·Micron : the International Research and Review Journal for Microscopy·C KisielowskiR Cieslinski
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Nov 30, 2019·Nature Communications·Junchao ChenLuming Peng
Jan 1, 2018·APL Materials·J A LiddleJ S Villarrubia
Aug 22, 2017·Nature Communications·Martin EkStig Helveg

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