Improving tapping mode atomic force microscopy with piezoelectric cantilevers

Ultramicroscopy
B RogersJ D Adams

Abstract

This article summarizes improvements to the speed, simplicity and versatility of tapping mode atomic force microscopy (AFM). Improvements are enabled by a piezoelectric microcantilever with a sharp silicon tip and a thin, low-stress zinc oxide (ZnO) film to both actuate and sense deflection. First, we demonstrate self-sensing tapping mode without laser detection. Similar previous work has been limited by unoptimized probe tips, cantilever thicknesses, and stress in the piezoelectric films. Tests indicate self-sensing amplitude resolution is as good or better than optical detection, with double the sensitivity, using the same type of cantilever. Second, we demonstrate self-oscillating tapping mode AFM. The cantilever's integrated piezoelectric film serves as the frequency-determining component of an oscillator circuit. The circuit oscillates the cantilever near its resonant frequency by applying positive feedback to the film. We present images and force-distance curves using both self-sensing and self-oscillating techniques. Finally, high-speed tapping mode imaging in liquid, where electric components of the cantilever require insulation, is demonstrated. Three cantilever coating schemes are tested. The insulated microactuator i...Continue Reading

References

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Citations

Jun 7, 2011·The Review of Scientific Instruments·Byung I KimJared A Rasmussen
Mar 5, 2009·The Review of Scientific Instruments·Bhaskar Mitra, Angelo Gaitas
Sep 4, 2012·The Review of Scientific Instruments·M Fairbairn, S O R Moheimani
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Sep 2, 2015·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Amir Nahavandi, Moharam Habibnejad Korayem
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Jan 18, 2012·Nanotechnology·Toshio Ando
Jul 14, 2018·Sensors·Alexandre PresasMònica Egusquiza
Jul 16, 2020·Microscopy Research and Technique·Alireza Habibnejad KorayemMoharam Habibnejad Korayem
Aug 29, 2020·Sensors·Bernard Ouma Alunda, Yong Joong Lee
Mar 10, 2019·Proceedings of the National Academy of Sciences of the United States of America·Qingqing YangRatnesh Lal

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