In-situ comprehensive calibration of a tri-port nano-electro-mechanical device

The Review of Scientific Instruments
E CollinH Godfrin

Abstract

We report on experiments performed in vacuum and at cryogenic temperatures on a tri-port nano-electro-mechanical (NEMS) device. One port is a very nonlinear capacitive actuation, while the two others implement the magnetomotive scheme with a linear input force port and a (quasi-linear) output velocity port. We present an experimental method enabling a full characterization of the nanomechanical device harmonic response: the nonlinear capacitance function C(x) is derived, and the normal parameters k and m (spring constant and mass) of the mode under study are measured through a careful definition of the motion (in meters) and of the applied forces (in Newtons). These results are obtained with a series of purely electric measurements performed without disconnecting/reconnecting the device, and rely only on known dc properties of the circuit, making use of a thermometric property of the oscillator itself: we use the Young modulus of the coating metal as a thermometer, and the resistivity for Joule heating. The setup requires only three connecting lines without any particular matching, enabling the preservation of a high impedance NEMS environment even at MHz frequencies. The experimental data are fit to a detailed electrical and t...Continue Reading

References

Aug 5, 1991·Physical Review Letters·D Rugar, P Grütter
May 18, 1992·Physical Review Letters·R E Mihailovich, J M Parpia
Apr 13, 2006·Nano Letters·Y T YangM L Roukes
Apr 27, 2007·Nature·Thomas P BurgScott R Manalis
Dec 31, 2008·Physical Review Letters·J D TeufelK W Lehnert
May 14, 2009·Nano Letters·J S HeronO Bourgeois

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Citations

Feb 6, 2018·Physical Review Letters·R R GazizulinE Collin
Dec 15, 2015·Physical Review. E, Statistical, Nonlinear, and Soft Matter Physics·M DefoortE Collin
May 8, 2018·ACS Nano·Olivier MailletEddy Collin

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