In situ lift-out using a FIB-SEM system

Micron : the International Research and Review Journal for Microscopy
R M Langford, C Clinton

Abstract

An in situ 'lift-out' technique for preparing transmission electron microscopy specimens, which is performed using secondary electron imaging within the chamber of a focused ion beam-SEM system is presented. The main advantage of this in situ approach, relative to the ex situ lift-out technique, is that secondary electron imaging enables higher magnifications to be used than is possible with optical microscopy. This makes the lift-out procedure more controllable and thus increases the overall success rate especially for inexperienced users. The technique is also compared with another in situ lift-out approach, the 'wedge' technique.

Citations

Mar 23, 2012·Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·Lorenz LechnerUte Kaiser
Sep 29, 2012·Beilstein Journal of Nanotechnology·Daniel FoxHongzhou Zhang
Oct 16, 2014·ACS Applied Materials & Interfaces·Sarang M BhawayBryan D Vogt
Dec 20, 2008·Journal of Microscopy·M Baram, W D Kaplan
Jun 2, 2006·Microscopy Research and Technique·Richard M Langford
Sep 10, 2013·Ultramicroscopy·Stefanie Fladischer, Werner Grogger
Oct 30, 2015·Nature Methods·Kedar Narayan, Sriram Subramaniam

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