Influence of microwave annealing on optical and electrical properties of plasma-induced defect structures in Si substrate

Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films : an Official Journal of the American Vacuum Society
Takaaki IwaiKouichi Ono

Abstract

The authors investigate the effects of microwave annealing (MWA) on the recovery of plasma process-induced ion-bombardment damage in Si substrates. For damage creation, Ar discharges by a capacitively coupled plasma etcher are used. For damage repairing, the MWA or a rapid thermal annealing (RTA) are conducted. The authors employ spectroscopic ellipsometry (SE), photoreflectance spectroscopy (PRS), and capacitance-voltage (C-V) measurement to analyze the damaged structures. Recovery of the damage is discussed by comparing the obtained parameters before and after the annealing processes. In the SE analysis, the change in the real part of dielectric constant (Δεr) is investigated. The Δεr spectral peak around 3.4 eV decreases with an increase in the annealing temperature (Ta) for both MWA and RTA, indicating the decrease in the density of defects created in the Si substrate. In the PRS analysis, the spectral peak intensity is found to decrease by the plasma exposure, and then to increase with Ta, which implies the recovery of the Si crystalline structure by MWA as well as by RTA. In the C-V measurement, the voltage shift (ΔVb) in the respective C-V curves is used as a measure of the number of defects present in the surface and in...Continue Reading

References

May 15, 1996·Physical Review. B, Condensed Matter·B MengR F Cooper
Apr 1, 1967·Applied Optics·E D Palik, B W Henvis

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