Influence of seed layers on optical properties of aluminum in the UV range

Optics Express
Sven StempfhuberAndreas Tünnermann

Abstract

The potential of titanium and copper seed layers to enhance the optical properties of aluminum films for ultra-violet (UV) applications is analyzed. The seed layers significantly influence the initial layer growth of aluminum films. For the titanium-seeded aluminum, a surface roughness of 0.34 nm was observed. UV spectral reflectance measurements showed an average higher reflectivity of 4.8% for wavelengths from 120 nm to 200 nm for the aluminum film grown on the titanium seed layer. Furthermore, the titanium-seeded aluminum coatings were stable at an elevated temperature of 225°C and showed no increase in surface roughness or pinholes.

References

Dec 16, 2005·Applied Optics·Cheng-Chung LeeYuuichi Takano
Dec 25, 2008·Nano Letters· Logeeswaran VjR Stanley Williams
Oct 1, 1976·Applied Optics·E Spiller
Feb 12, 2014·Applied Optics·S WilbrandtN Kaiser
May 3, 2018·Optics Express·Luis V Rodríguez De MarcosBelén Perea-Abarca

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Citations

Mar 18, 2021·Optics Express·Juan I LarruquertPaloma López-Reyes
Jul 17, 2021·Optics Express·Paul SchmittStefan Schwinde

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