Initial stages of few-layer graphene growth by microwave plasma-enhanced chemical vapour deposition

Nanotechnology
Roumen VitchevChris Van Haesendonck

Abstract

A promising method for the production of few-layer graphene (FLG) is microwave plasma-enhanced chemical vapour deposition (MW PECVD). However, the growth mechanism of PECVD-synthesized FLG is not completely understood. The aim of this work was to investigate the initial stages of the growth process of FLG deposited by MW PECVD on several substrates (quartz, silicon, platinum). The deposited thin films were characterized by angle-resolved x-ray photoelectron spectroscopy (ARXPS), electron backscattered diffraction (EBSD), scanning electron microscopy (SEM) and x-ray diffraction (XRD). It was found that the initial stages of the deposition were different for the three chosen substrate materials. However, the fully grown FLG layers were similar for all substrates.

References

Oct 23, 2004·Science·K S NovoselovA A Firsov
Jul 20, 2005·Proceedings of the National Academy of Sciences of the United States of America·K S NovoselovA K Geim
Oct 20, 2007·Nano Letters·Scott GiljeRichard B Kaner
Jul 30, 2008·Nanotechnology·Alexander MalesevicChris Van Haesendonck

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Citations

Feb 12, 2013·Nanoscale·Adriano AmbrosiMartin Pumera
Apr 27, 2011·Advanced Materials·Shuping PangKlaus Müllen
Aug 30, 2012·Advanced Materials·Nathan O WeissXiangfeng Duan
Jul 11, 2012·Angewandte Chemie·Long ChenKlaus Müllen
Jan 16, 2018·ACS Omega·Javishk ShahMaria L Carreon
Aug 28, 2020·Chemical Reviews·Zhuxing SunYun Hang Hu
Jun 5, 2014·Chemical Reviews·Adriano AmbrosiMartin Pumera

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