Integration of ZnO microcrystals with tailored dimensions forming light emitting diodes and UV photovoltaic cells

Nano Letters
Jesse J ColeHeiko O Jacobs

Abstract

This article reports a new integration approach to produce arrays of ZnO microcrystals for optoelectronic and photovoltaic applications. Demonstrated applications are n-ZnO/p-GaN heterojunction LEDs and photovoltaic cells. The integration process uses an oxygen plasma treatment in combination with a photoresist pattern on magnesium doped GaN substrates to define a narrow sub-100 nm width nucleation region. Nucleation is followed by lateral epitaxial overgrowth producing single crystal disks of ZnO with desired size over 2 in. wafers. The process provides control over the dimensions (<1% STD) and the location (0.7% STD pitch variation) of the ZnO crystals. The quality of the patterned ZnO is high; the commonly observed defect related emission in the electroluminescence spectra is completely suppressed, and a single near-band-edge UV peak is observed.

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Citations

May 29, 2012·Nature Nanotechnology·Dong Ick SonWon Kook Choi
Apr 7, 2017·Optics Express·Qiuguo LiSheng Chu
Sep 24, 2010·Advanced Materials·Sheng XuZhong Lin Wang
Mar 15, 2020·Nanomaterials·Stanislav TiagulskyiJozef Veselý
Jan 17, 2020·Nanomaterials·Abu Ul Hassan Sarwar RanaAreej Shahid
May 6, 2019·Physical Review Letters·Takashi KinoshitaHajime Ishihara

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