Iterative deconvolution technique for measurements of diffraction-limited images on optical microscopes

Journal of Modern Optics
Wenlong LuWun-Mao Luo

Abstract

Diffraction limit is usually a thorny problem in an optical inspection system. In this investigation, a model-based deconvolution technique was developed to recover diffraction-limited images, where images with sizes smaller than the diffraction limit could be recognized. Experiments were carried out with a traditional microscope at 200× magnification coupled with a halogen light source for a series of line width samples. The point spread function of the imaging optics was first obtained from an estimated model and then combined with a nonlinear deconvolution algorithm to calculate the full width at half maximum and reconstruct the line widths. Experimental results indicate that a measurement error below one pixel size of the measurement system is achievable. Accordingly, the target of nanoscale line width inspection based on a low cost and real-time image processing technique can be fulfilled, which greatly increases the ability of nanoscaling on optical microscopes.

References

Jul 1, 1992·Journal of the Optical Society of America. A, Optics and Image Science·T J Holmes
Sep 19, 2006·Biophysical Journal·Samuel T HessMichael D Mason
Jan 1, 1990·IEEE Transactions on Medical Imaging·K Lange
Jan 1, 1989·IEEE Transactions on Medical Imaging·T Hebert, R Leahy
Jan 26, 2011·Optics Express·Zhuo WangGabriel Popescu

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