Mach-Zehnder Interferometer Biochemical Sensor Based on Silicon-on-Insulator Rib Waveguide with Large Cross Section

Sensors
Dengpeng YuanTianjian Li

Abstract

A high-sensitivity Mach-Zehnder interferometer (MZI) biochemical sensing platform based on Silicon-in-insulator (SOI) rib waveguide with large cross section is proposed in this paper. Based on the analyses of the evanescent field intensity, the mode polarization and cross section dimensions of the SOI rib waveguide are optimized through finite difference method (FDM) simulation. To realize high-resolution MZI read-out configuration based on the SOI rib waveguide, medium-filled trenches are employed and their performances are simulated through two-dimensional finite-difference-time domain (2D-FDTD) method. With the fundamental EH-polarized mode of the SOI rib waveguide with a total rib height of 10 μm, an outside rib height of 5 μm and a rib width of 2.5 μm at the operating wavelength of 1550 nm, when the length of the sensitive window in the MZI configuration is 10 mm, a homogeneous sensitivity of 7296.6%/refractive index unit (RIU) is obtained. Supposing the resolutions of the photoelectric detectors connected to the output ports are 0.2%, the MZI sensor can achieve a detection limit of 2.74 × 10(-6) RIU. Due to high coupling efficiency of SOI rib waveguide with large cross section with standard single-mode glass optical fiber...Continue Reading

References

Aug 29, 2007·Analytica Chimica Acta·Jongin HongDae Sung Yoon
Nov 3, 2007·Optics Letters·Carlos A BarriosR Casquel
Apr 3, 2008·Optics Letters·Carlos A BarriosR Casquel
Jun 19, 2008·Analytica Chimica Acta·Xudong FanYuze Sun
Aug 26, 2002·Optics Express·Zhaoming Zhu, Thomas Brown
Jun 26, 2006·Optics Express·Yusheng QianJianhua Jiang
Apr 16, 2007·Optics Express·Francesco Dell'Olio, Vittorio M Passaro
Dec 10, 2007·Optics Express·Yusheng QianGregory P Nordin

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BETA
electron beam lithography
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