PMID: 8946770Nov 1, 1996Paper

Measuring the performance of scanning electron microscope detectors

Scanning
D C JoyR D Bunn

Abstract

A simple digital method of measuring the performance of detectors in the scanning electron microscope (SEM) is described. The value derived is absolute and can therefore be used to compare both different detectors on the same instrument as well as different detectors on different instruments. The technique can be applied to secondary electron, backscattered electron, and energy-dispersive x-ray detectors. Examples are given of measurements made on a variety of commercial detectors installed on a number of current SEMs.

Citations

Nov 28, 2009·Journal of Microscopy·I Müllerová, I Konvalina
Nov 3, 2011·Journal of Microscopy·G D Danilatos
Feb 1, 2018·Nature Communications·Yoshiyuki KubotaYasuo Kawaguchi
Sep 2, 1998·Journal of Microscopy·D C Joy
Aug 27, 2005·Journal of Electron Microscopy·Ludek Frank
Jul 10, 2008·Scanning·P CizmarUNKNOWN National Institute of Standards and Technology
Oct 27, 2006·Scanning·Ivo Konvalina, Ilona Müllerová
Nov 3, 2020·Microscopy Research and Technique·Petr SchauerMiroslav Kučera

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