Mechanical characterization of porous nano-thin films by use of atomic force acoustic microscopy

Ultramicroscopy
Malgorzata Kopycinska-MüllerK-J Wolter

Abstract

The indentation modulus of thin films of porous organosilicate glass with a nominal porosity content of 30% and thicknesses of 350nm, 200nm, and 46nm is determined with help of atomic force acoustic microscopy (AFAM). This scanning probe microscopy based technique provides the highest possible depth resolution. The values of the indentation modulus obtained for the 350nm and 200nm thin films were respectively 6.3GPa±0.2GPa and 7.2GPa±0.2GPa and free of the substrate influence. The sample with the thickness of 46nm was tested in four independent measurement sets. Cantilevers with two different tip radii of about 150nm and less than 50nm were applied in different force ranges to obtain a result for the indentation modulus that was free of the substrate influence. A detailed data analysis yielded value of 8.3GPa±0.4GPa for the thinnest film. The values of the indentation modulus obtained for the thin films of porous organosilicate glasses increased with the decreasing film thickness. The stiffening observed for the porous films could be explained by evolution of the pore topology as a function of the film thickness. To ensure that our results were free of the substrate influence, we analyzed the ratio of the sample deformation as ...Continue Reading

References

May 15, 1992·Physical Review. B, Condensed Matter·A L WeisenhornP K Hansma
Mar 3, 1986·Physical Review Letters·G BinnigC Gerber
Feb 2, 2006·Ultramicroscopy·Malgorzata Kopycinska-MüllerDonna C Hurley
Jul 26, 2008·Nature Nanotechnology·Ozgur SahinOlav Solgaard
May 9, 2012·The Review of Scientific Instruments·M Kopycinska-MüllerK-J Wolter
Nov 2, 2012·Langmuir : the ACS Journal of Surfaces and Colloids·Maxim E Dokukin, Igor Sokolov

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Citations

Sep 14, 2018·The Journal of Physical Chemistry. B·J C Phillips
Jul 28, 2020·Langmuir : the ACS Journal of Surfaces and Colloids·I S OvchinnikovM R Baklanov

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