MEMS vibrational energy harvesters

Science and Technology of Advanced Materials
Hiroshi ToshiyoshiHiroyuki Fujita

Abstract

In this paper, we look into the fundamental mechanism to retrieve the power from physical vibrations by using microelectromechanical systems (MEMS) energy harvesters. An analytical model is presented for the velocity-damped resonant generator (VDRG) that delivers electrical power through the power enhancement mechanism using the mechanical resonance of a suspended mass. Deliverable power is also analytically discussed with respect to the theoretical limit, and a view to understand the VDRG behaviors is presented in association with the impedance matching condition and the quality factors. Mechano-electric power conversions including electrostatic induction, electromagnetic induction, and piezoelectric effect are discussed to study the scaling effect. Recent examples of MEMS VDRGs are reviewed and evaluated in terms of the power density.

References

Aug 3, 2015·Science and Technology of Advanced Materials·Kenji Uchino
May 1, 2018·Science and Technology of Advanced Materials·Chikako SanoHiroyuki Fujita
Jun 12, 2018·Science and Technology of Advanced Materials·Ester M PalmeroAlberto Bollero
Jun 20, 2018·Science and Technology of Advanced Materials·Seonwoo KimYuji Suzuki
Oct 3, 2018·Science and Technology of Advanced Materials·Takuya TsukamotoTakaaki Suzuki

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Methods Mentioned

BETA
chip
scanning electron microscopy

Software Mentioned

VDRG

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