Metrology of a Focusing Capillary Using Optical Ptychography

Sensors
Xiaojing HuangYong S Chu

Abstract

The focusing property of an ellipsoidal monocapillary has been characterized using the ptychography method with a 405 nm laser beam. The recovered wavefront gives a 12.5×10.4μm2 focus. The reconstructed phase profile of the focused beam can be used to estimate the height error of the capillary surface. The obtained height error shows a Gaussian distribution with a standard deviation of 1.3 μm. This approach can be used as a quantitative tool for evaluating the inner functional surfaces of reflective optics, complementary to conventional metrology methods.

References

Jul 19, 2008·Science·Pierre ThibaultFranz Pfeiffer
Aug 20, 2010·Optics Express·Manuel Guizar-SicairosJames R Fienup
Jan 1, 1992·Journal of X-ray Science and Technology·J VossH Wongel
Dec 21, 2013·Scientific Reports·Xiaojing HuangYong S Chu
Apr 3, 2014·The Review of Scientific Instruments·E NazaretskiY S Chu
Jun 13, 2014·Optics Express·Xiaojing HuangYong S Chu
Mar 15, 2015·Scientific Reports·Xiaojing HuangYong S Chu
Jul 3, 2015·Journal of Synchrotron Radiation·Tim SaldittMichael Sprung
Mar 2, 2017·Nature Communications·Frank SeibothChristian G Schroer
Oct 4, 2018·The Review of Scientific Instruments·Hidekazu MimuraHaruhiko Ohashi
Sep 7, 2019·Journal of Synchrotron Radiation·Hiroto MotoyamaHidekazu Mimura

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