Microstructures Manufactured in Diamond by Use of Laser Micromachining

Materials
Mariusz DudekA Karczemska

Abstract

Different microstructures were created on the surface of a polycrystalline diamond plate (obtained by microwave plasma-enhanced chemical vapor deposition-MW PECVD process) by use of a nanosecond pulsed DPSS (diode pumped solid state) laser with a 355 nm wavelength and a galvanometer scanning system. Different average powers (5 to 11 W), scanning speeds (50 to 400 mm/s) and scan line spacings ("hatch spacing") (5 to 20 µm) were applied. The microstructures were then examined using scanning electron microscopy, confocal microscopy and Raman spectroscopy techniques. Microstructures exhibiting excellent geometry were obtained. The precise geometries of the microstructures, exhibiting good perpendicularity, deep channels and smooth surfaces show that the laser microprocessing can be applied in manufacturing diamond microfluidic devices. Raman spectra show small differences depending on the process parameters used. In some cases, the diamond band (at 1332 cm-1) after laser modification of material is only slightly wider and shifted, but with no additional peaks, indicating that the diamond is almost not changed after laser interaction. Some parameters did show that the modification of material had occurred and additional peaks in Ram...Continue Reading

References

Nov 20, 2013·Accounts of Chemical Research·Kangning RenHongkai Wu
Sep 12, 2015·Journal of Nanoscience and Nanotechnology·M FijalkowskiS Mitura

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Citations

Feb 5, 2021·Frontiers in Cell and Developmental Biology·M Fernanda Palominos, Kathleen E Whitlock

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Methods Mentioned

BETA
scanning electron microscopy

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