Modelling focused electron beam induced deposition beyond Langmuir adsorption

Beilstein Journal of Nanotechnology
Dédalo Sanz-Hernández, Amalio Fernández-Pacheco

Abstract

In this work, the continuum model for focused electron beam induced deposition (FEBID) is generalized to account for multilayer adsorption processes. Two types of adsorption energies, describing both physisorption and spontaneous chemisorption, are included. Steady state solutions under no diffusion are investigated and compared under a wide range of conditions. The different growth regimes observed are fully explained by relative changes in FEBID characteristic frequencies. Additionally, we present a set of FEBID frequency maps where growth rate and surface coverage are plotted as a function of characteristic timescales. From the analysis of Langmuir, as well as homogeneous and heterogeneous multilayer maps, we infer that three types of growth regimes are possible for FEBID under no diffusion, resulting into four types of adsorption isotherms. We propose the use of these maps as a powerful tool for the analysis of FEBID processes.

References

Sep 21, 2005·Langmuir : the ACS Journal of Surfaces and Colloids·Christelle HauchardPaul Rowntree
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Mar 21, 2013·Scientific Reports·Amalio Fernández-PachecoRussell P Cowburn
Sep 21, 2013·ACS Applied Materials & Interfaces·Chris ElbadawiCharlene J Lobo
Sep 26, 2013·Beilstein Journal of Nanotechnology·Willem F van DorpJeff T M De Hosson
Aug 12, 2014·ACS Applied Materials & Interfaces·Roland SachserMichael Huth
Oct 2, 2015·Beilstein Journal of Nanotechnology·Milos TothIvo Utke
Jan 15, 2016·Small·Paolo VavassoriAndreas Berger
May 18, 2016·ACS Nano·Stephen JesseOlga S Ovchinnikova
Jul 28, 2016·Nanotechnology·Rosa CórdobaBert Koopmans
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Mar 9, 2017·ACS Applied Materials & Interfaces·Robert WinklerHarald Plank
Jun 10, 2017·Nature Communications·Amalio Fernández-PachecoRussell P Cowburn

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Citations

Jul 7, 2018·Beilstein Journal of Nanotechnology·Petra SwiderekCornelis W Hagen
Dec 22, 2019·Micromachines·Jason D FowlkesHarald Plank
Jul 4, 2018·Nanomaterials·Dédalo Sanz-HernándezAmalio Fernández-Pacheco
Aug 30, 2020·Materials·Amalio Fernández-PachecoOleksandr V Dobrovolskiy
Jan 28, 2021·Micromachines·Lukas Matthias SeewaldHarald Plank

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Software Mentioned

FEBID

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