Multi-layering of SU-8 exhibits distinct geometrical transitions from circular to planarized profiles.

Biomicrofluidics
Martin SauzadeEric Brouzes

Abstract

The negative tone photoresist SU-8 permits the creation of micrometer-scale structures by optical lithography. It is also the most used photoresist in soft lithography for the fast-prototyping of microfluidic devices. Despite its importance, the effect of capillary forces on SU-8 multi-layering onto topographical features has not been thoroughly studied. In particular, the profile of the added layer has not been examined in detail. The overlaying process exhibits a set of distinct behaviors, or regimes, depending on the relative thickness of the overlay and the underlying rectangular pattern. We demonstrate how capillary effects control the profile of multi-layer microchannels in a predictable manner. We derive a simple static model to describe the evolution of the overlay as a function of dimensionless geometric parameters. Our study provides a critical understanding of the parameters that govern multi-layer spin coating.

References

Jul 21, 2009·Proceedings of the National Academy of Sciences of the United States of America·Eric BrouzesMichael L Samuels
Dec 9, 2010·Biomicrofluidics·Sungyoung Choi, Je-Kyun Park
Dec 1, 1998·Analytical Chemistry·D C DuffyG M Whitesides
May 29, 2012·Biosensors & Bioelectronics·Ane AltunaLuis J Fernández
Jun 30, 2012·Nature Methods·Johannes SchindelinAlbert Cardona
Aug 30, 2012·Nature Methods·Caroline A SchneiderKevin W Eliceiri
Jul 17, 2014·Lab on a Chip·Steve Arscott

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