Multilayer block copolymer meshes by orthogonal self-assembly

Nature Communications
Amir Tavakkoli K GKarl K Berggren

Abstract

Continued scaling-down of lithographic-pattern feature sizes has brought templated self-assembly of block copolymers (BCPs) into the forefront of nanofabrication research. Technologies now exist that facilitate significant control over otherwise unorganized assembly of BCP microdomains to form both long-range and locally complex monolayer patterns. In contrast, the extension of this control into multilayers or 3D structures of BCP microdomains remains limited, despite the possible technological applications in next-generation devices. Here, we develop and analyse an orthogonal self-assembly method in which multiple layers of distinct-molecular-weight BCPs naturally produce nanomesh structures of cylindrical microdomains without requiring layer-by-layer alignment or high-resolution lithographic templating. The mechanisms for orthogonal self-assembly are investigated with both experiment and simulation, and we determine that the control over height and chemical preference of templates are critical process parameters. The method is employed to produce nanomeshes with the shapes of circles and Y-intersections, and is extended to produce three layers of orthogonally oriented cylinders.

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Citations

Nov 4, 2016·ACS Applied Materials & Interfaces·Paola LovaDavide Comoretto
Dec 23, 2016·Nature Communications·Atikur RahmanKevin G Yager
Jul 4, 2017·Langmuir : the ACS Journal of Surfaces and Colloids·Jongmin KimChang-Soo Lee
Apr 16, 2019·Nanoscale·Hyunsung JungWoon Ik Park
Aug 21, 2020·Proceedings of the National Academy of Sciences of the United States of America·Yusuke HibiTomokazu Iyoda
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Nov 1, 2017·Methods and Applications in Fluorescence·Philip Yip, Jens Uwe Sutter
Jan 22, 2021·ACS Applied Materials & Interfaces·Dong Hyup KimSo Youn Kim
Jul 18, 2021·Macromolecular Rapid Communications·Mark RobertsonZhe Qiang
Feb 15, 2018·ACS Applied Materials & Interfaces·Jaewon ChoiThomas P Russell
Jun 8, 2018·Nano Letters·Li-Chen ChengCaroline A Ross
Mar 12, 2020·ACS Nano·Arkadiusz A LeniartPawel W Majewski
Oct 20, 2020·ACS Nano·Hejin HuangAlfredo Alexander-Katz
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May 14, 2019·ACS Applied Materials & Interfaces·Seung Keun ChaSang Ouk Kim
Oct 15, 2021·ACS Nano·Runze LiuCaroline A Ross
Oct 28, 2021·ACS Applied Materials & Interfaces·Sangho LeeCaroline A Ross

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Methods Mentioned

BETA
electron-beam lithography
X-ray
chemical modification

Software Mentioned

Matlab
GISAXS
SCFT

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