Nanotribological characterization of digital micromirror devices using an atomic force microscope

Ultramicroscopy
Huiwen Liu, Bharat Bhushan

Abstract

Texas Instruments' digital micromirror device (DMD) comprises an array of fast digital micromirrors, monolithically integrated onto and controlled by an underlying silicon memory chip. The DMD is one of the few success stories in the emerging field of MEMS. In this study, an atomic force microscope (AFM) has been used to characterize the nanotribological properties of the elements of the DMD. An AFM methodology was developed to identify and remove micromirrors of interest. The surface roughness, adhesion, friction, and stiffness properties of the DMD elements were studied. The influence of relative humidity and temperature on the behavior of the DMD element surfaces was also investigated. Potential mechanisms for wear and stiction are discussed in light of the findings.

Citations

Mar 7, 2014·The Review of Scientific Instruments·Krystian L WlodarczykDuncan P Hand
Oct 16, 2007·Journal of Colloid and Interface Science·Bharat BhushanBarbara Kinzig
Nov 17, 2010·Journal of Microscopy·M PalacioB Bhushan
May 17, 2006·Acta Biomaterialia·Bharat BhushanStephen C Lee
Feb 28, 2008·Neurosurgery·James B ElderMichael L J Apuzzo
Apr 3, 2009·Langmuir : the ACS Journal of Surfaces and Colloids·Oleg A MazyarClare McCabe
Nov 26, 2021·Graefe's Archive for Clinical and Experimental Ophthalmology = Albrecht Von Graefes Archiv Für Klinische Und Experimentelle Ophthalmologie·Laura Dussan MolinosFolkert K Horn

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