New Colloidal Lithographic Nanopatterns Fabricated by Combining Pre-Heating and Reactive Ion Etching.

Nanoscale Research Letters
Chunxiao CongTing Yu

Abstract

We report a low-cost and simple method for fabrication of nonspherical colloidal lithographic nanopatterns with a long-range order by preheating and oxygen reactive ion etching of monolayer and double-layer polystyrene spheres. This strategy allows excellent control of size and morphology of the colloidal particles and expands the applications of the colloidal patterns as templates for preparing ordered functional nanostructure arrays. For the first time, various unique nanostructures with long-range order, including network structures with tunable neck length and width, hexagonal-shaped, and rectangular-shaped arrays as well as size tunable nanohole arrays, were fabricated by this route. Promising potentials of such unique periodic nanostructures in various fields, such as photonic crystals, catalysts, templates for deposition, and masks for etching, are naturally expected.

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Citations

Apr 5, 2012·ACS Applied Materials & Interfaces·Xianglin LiHong Jin Fan
Jul 10, 2013·Chemical Society Reviews·Hailin CongXuesong Liu
Apr 2, 2010·The Analyst·Jean-François MassonLudovic S Live
Mar 7, 2020·Nanomaterials·Valeria LotitoStjepko Fazinić
Dec 1, 2011·Nanoscale Research Letters·Xueyong WeiKyle Jiang
Mar 4, 2020·Nanotechnology·Lingpeng LuoMichael Giersig
Apr 2, 2010·Analytical Chemistry·Ludovic S LiveJean-François Masson

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Methods Mentioned

BETA
biosensors
scanning electron microscopy

Software Mentioned

NSL

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