New Insights into Sequential Infiltration Synthesis

ECS Transactions
Jeffrey W ElamYu-Chih Tseng

Abstract

Sequential infiltration synthesis (SIS) is a process derived from ALD in which a polymer is infused with inorganic material using sequential, self-limiting exposures to gaseous precursors. SIS can be used in lithography to harden polymer resists rendering them more robust towards subsequent etching, and this permits deeper and higher-resolution patterning of substrates such as silicon. Herein we describe recent investigations of a model system: Al2O3 SIS using trimethyl aluminum (TMA) and H2O within the diblock copolymer, poly(styrene-block-methyl methacrylate) (PS-b-PMMA). Combining in-situ Fourier transform infrared absorption spectroscopy, quartz-crystal microbalance, and synchrotron grazing incidence small angle X-ray scattering with high resolution scanning transmission electron microscope tomography, we elucidate important details of the SIS process: 1) TMA adsorption in PMMA occurs through a weakly-bound intermediate; 2) the SIS kinetics are diffusion-limited, with desorption 10× slower than adsorption; 3) dynamic structural changes occur during the individual precursor exposures. These findings have important implications for applications such as SIS lithography.

Citations

Oct 3, 2019·Advanced Materials·Heyou ZhangPaul Mulvaney
Nov 24, 2019·The Journal of Chemical Physics·Ruben Z WaldmanSeth B Darling
Oct 25, 2020·Polymers·Christian Pinto-GómezMarta Fernández-Regúlez
May 1, 2021·Nanomaterials·Eleonora CaraFederico Ferrarese Lupi
May 6, 2021·Dalton Transactions : an International Journal of Inorganic Chemistry·Hardik Jain, Paul Poodt
Nov 29, 2017·ACS Applied Materials & Interfaces·Antoine LegrainMarc Zelsmann
Jan 8, 2019·Langmuir : the ACS Journal of Surfaces and Colloids·Yunlong SheDiana Berman

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