Noise and sensitivity characteristics of solid-state nanopores with a boron nitride 2-D membrane on a pyrex substrate

Nanoscale
Kyeong-Beom ParkKi-Bum Kim

Abstract

We have fabricated highly sensitive and low noise solid-state nanopores with multiple layers of boron nitride (BN) membranes transferred onto a pyrex substrate. Both the dielectric and flicker noise of the device, which have been described as one of the bottlenecks to making highly sensitive 2-D membrane nanopore devices, have been reduced as follows. Firstly, a pyrex substrate with a low dielectric constant (εr = 4.7-5.1) and low dielectric loss (D < 0.001) is used instead of a Si substrate to reduce the dielectric noise of the device. Secondly, flicker noise is minimized by employing a 100 nm thick SiNx supporting layer with a small opening (less than 100 nm) for BN membrane transfer to enhance the mechanical stability. The flicker noise is further reduced by transferring multiple layers of BN instead of a single layer of BN. The resulting multi-layered BN device shows significant reduction of dielectric and 1/f noise as compared to the devices with a single layer of the BN and Si substrate. Furthermore, we demonstrate dsDNA translocations with a high signal to noise ratio around 50 at 100 and 10 kHz bandwidths.

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Citations

Jun 9, 2017·Nano Letters·Ke LiuAleksandra Radenovic
Apr 10, 2020·Nanoscale·Shihao SuJianming Xue
Jun 28, 2019·Nanotechnology·Alessio FragassoCees Dekker
Apr 24, 2019·Sensors·Qi Chen, Zewen Liu
Jul 22, 2018·PloS One·Wook ChoiChang-Soo Han
Sep 28, 2018·Advanced Materials·Kidan LeeKi-Bum Kim
Dec 15, 2020·Biosensors & Bioelectronics·Pengkun XiaChao Wang
Feb 13, 2020·ACS Nano·Alessio FragassoCees Dekker
Jul 21, 2017·ACS Sensors·Jingjie ShaYunfei Chen

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