Non-contact XUV metrology of Ru/B4 C multilayer optics by means of Hartmann wavefront analysis

Applied Optics
Mabel Ruiz-LopezDavide Bleiner

Abstract

Short-wavelength imaging, spectroscopy, and lithography scale down the characteristic length-scale to nanometers. This poses tight constraints on the optics finishing tolerances, which is often difficult to characterize. Indeed, even a tiny surface defect degrades the reflectivity and spatial projection of such optics. In this study, we demonstrate experimentally that a Hartmann wavefront sensor for extreme ultraviolet (XUV) wavelengths is an effective non-contact analytical method for inspecting the surface of multilayer optics. The experiment was carried out in a tabletop laboratory using a high-order harmonic generation as an XUV source. The wavefront sensor was used to measure the wavefront errors after the reflection of the XUV beam on a spherical Ru/B4C multilayer mirror, scanning a large surface of approximately 40 mm in diameter. The results showed that the technique detects the aberrations in the nanometer range.

References

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Aug 5, 2014·Applied Optics·Davide BleinerDetlef Günther
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Jun 3, 2016·The Review of Scientific Instruments·Lisa A PoyneerJun Feng
Aug 10, 2017·Optics Express·Masoud MehrjooAdrian P Mancuso

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Citations

May 14, 2021·Applied Optics·Hongfeng Xu, Jigang Wu

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