Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator

Sensors
Majed S Al-GhamdiMustafa Yavuz

Abstract

We experimentally investigate the primary superharmonic of order two and subharmonic of order one-half resonances of an electrostatic MEMS actuator under direct excitation. We identify the parameters of a one degree of freedom (1-DOF) generalized Duffing oscillator model representing it. The experiments were conducted in soft vacuum to reduce squeeze-film damping, and the actuator response was measured optically using a laser vibrometer. The predictions of the identified model were found to be in close agreement with the experimental results. We also identified the noise spectral density of process (actuation voltage) and measurement noise.

References

Jan 29, 2003·European Journal of Pharmaceutics and Biopharmaceutics : Official Journal of Arbeitsgemeinschaft Für Pharmazeutische Verfahrenstechnik E.V·Letícia S KoesterValquiria L Bassani
Feb 13, 2003·American Journal of Epidemiology·Stephen KoesterWei Teng

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vibrometer

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